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Microelectronic engineering, 55 (2001) S. 219 - 225
...Ionentechnik...
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Applied physics letters, 78 (2001) S. 4184
...Ionentechnik...
OpenAccess 
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Kluth, P.
2001
Applied physics letters, 79 (2001) S. 824
...Ionentechnik...
OpenAccess 
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Kluth, P.
2001
Microelectronic engineering, 55 (2001) S. 177
...Ionentechnik...
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